JPS5631226B2 - - Google Patents

Info

Publication number
JPS5631226B2
JPS5631226B2 JP15561775A JP15561775A JPS5631226B2 JP S5631226 B2 JPS5631226 B2 JP S5631226B2 JP 15561775 A JP15561775 A JP 15561775A JP 15561775 A JP15561775 A JP 15561775A JP S5631226 B2 JPS5631226 B2 JP S5631226B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15561775A
Other languages
Japanese (ja)
Other versions
JPS5279395A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15561775A priority Critical patent/JPS5279395A/ja
Publication of JPS5279395A publication Critical patent/JPS5279395A/ja
Publication of JPS5631226B2 publication Critical patent/JPS5631226B2/ja
Granted legal-status Critical Current

Links

JP15561775A 1975-12-25 1975-12-25 Surface polishing device of thin film sheet Granted JPS5279395A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15561775A JPS5279395A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15561775A JPS5279395A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Publications (2)

Publication Number Publication Date
JPS5279395A JPS5279395A (en) 1977-07-04
JPS5631226B2 true JPS5631226B2 (en, 2012) 1981-07-20

Family

ID=15609915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15561775A Granted JPS5279395A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Country Status (1)

Country Link
JP (1) JPS5279395A (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125768A (ja) * 1984-11-20 1986-06-13 Sumitomo Metal Ind Ltd 脆性材料の切断方法

Also Published As

Publication number Publication date
JPS5279395A (en) 1977-07-04

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