JPS5630930B2 - - Google Patents

Info

Publication number
JPS5630930B2
JPS5630930B2 JP13990175A JP13990175A JPS5630930B2 JP S5630930 B2 JPS5630930 B2 JP S5630930B2 JP 13990175 A JP13990175 A JP 13990175A JP 13990175 A JP13990175 A JP 13990175A JP S5630930 B2 JPS5630930 B2 JP S5630930B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13990175A
Other languages
Japanese (ja)
Other versions
JPS5264268A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13990175A priority Critical patent/JPS5264268A/ja
Publication of JPS5264268A publication Critical patent/JPS5264268A/ja
Publication of JPS5630930B2 publication Critical patent/JPS5630930B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid Thermionic Cathode (AREA)
JP13990175A 1975-11-21 1975-11-21 Thermally electron emitting cathode structure Granted JPS5264268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13990175A JPS5264268A (en) 1975-11-21 1975-11-21 Thermally electron emitting cathode structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13990175A JPS5264268A (en) 1975-11-21 1975-11-21 Thermally electron emitting cathode structure

Publications (2)

Publication Number Publication Date
JPS5264268A JPS5264268A (en) 1977-05-27
JPS5630930B2 true JPS5630930B2 (no) 1981-07-17

Family

ID=15256247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13990175A Granted JPS5264268A (en) 1975-11-21 1975-11-21 Thermally electron emitting cathode structure

Country Status (1)

Country Link
JP (1) JPS5264268A (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112017006569T5 (de) 2017-02-28 2019-09-26 Hitachi High-Technologies Corporation Elektronenquelle und diese verwendende elektronenstrahlvorrichtung

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451469A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Thermionic emission cathode
JPS5451466A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Direct heated thermionic emission cathode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112017006569T5 (de) 2017-02-28 2019-09-26 Hitachi High-Technologies Corporation Elektronenquelle und diese verwendende elektronenstrahlvorrichtung
US10707046B2 (en) 2017-02-28 2020-07-07 Hitachi High-Tech Corporation Electron source and electron beam device using the same

Also Published As

Publication number Publication date
JPS5264268A (en) 1977-05-27

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