JPS5630857B2 - - Google Patents
Info
- Publication number
- JPS5630857B2 JPS5630857B2 JP5511374A JP5511374A JPS5630857B2 JP S5630857 B2 JPS5630857 B2 JP S5630857B2 JP 5511374 A JP5511374 A JP 5511374A JP 5511374 A JP5511374 A JP 5511374A JP S5630857 B2 JPS5630857 B2 JP S5630857B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5511374A JPS5630857B2 (en) | 1974-05-17 | 1974-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5511374A JPS5630857B2 (en) | 1974-05-17 | 1974-05-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50146403A JPS50146403A (en) | 1975-11-25 |
| JPS5630857B2 true JPS5630857B2 (en) | 1981-07-17 |
Family
ID=12989682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5511374A Expired JPS5630857B2 (en) | 1974-05-17 | 1974-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5630857B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0116173B2 (en) * | 1982-08-04 | 1989-03-23 | Hitachi Ltd |
-
1974
- 1974-05-17 JP JP5511374A patent/JPS5630857B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0116173B2 (en) * | 1982-08-04 | 1989-03-23 | Hitachi Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50146403A (en) | 1975-11-25 |