JPS5629090B2 - - Google Patents
Info
- Publication number
- JPS5629090B2 JPS5629090B2 JP13650676A JP13650676A JPS5629090B2 JP S5629090 B2 JPS5629090 B2 JP S5629090B2 JP 13650676 A JP13650676 A JP 13650676A JP 13650676 A JP13650676 A JP 13650676A JP S5629090 B2 JPS5629090 B2 JP S5629090B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13650676A JPS5362044A (en) | 1976-11-13 | 1976-11-13 | Low noise type pressure fluid discharger |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13650676A JPS5362044A (en) | 1976-11-13 | 1976-11-13 | Low noise type pressure fluid discharger |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5362044A JPS5362044A (en) | 1978-06-03 |
| JPS5629090B2 true JPS5629090B2 (en) | 1981-07-06 |
Family
ID=15176746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13650676A Granted JPS5362044A (en) | 1976-11-13 | 1976-11-13 | Low noise type pressure fluid discharger |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5362044A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4781253B2 (en) * | 2006-12-22 | 2011-09-28 | 大日本スクリーン製造株式会社 | Substrate processing apparatus and substrate processing method |
| KR101405063B1 (en) * | 2013-07-05 | 2014-06-10 | (주) 터보맥스 | Discharge pipe assembly for pneumatic machine |
-
1976
- 1976-11-13 JP JP13650676A patent/JPS5362044A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5362044A (en) | 1978-06-03 |