JPS5628772Y2 - - Google Patents
Info
- Publication number
- JPS5628772Y2 JPS5628772Y2 JP1978086121U JP8612178U JPS5628772Y2 JP S5628772 Y2 JPS5628772 Y2 JP S5628772Y2 JP 1978086121 U JP1978086121 U JP 1978086121U JP 8612178 U JP8612178 U JP 8612178U JP S5628772 Y2 JPS5628772 Y2 JP S5628772Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978086121U JPS5628772Y2 (cs) | 1978-06-24 | 1978-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978086121U JPS5628772Y2 (cs) | 1978-06-24 | 1978-06-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS554531U JPS554531U (cs) | 1980-01-12 |
| JPS5628772Y2 true JPS5628772Y2 (cs) | 1981-07-08 |
Family
ID=29010406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978086121U Expired JPS5628772Y2 (cs) | 1978-06-24 | 1978-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5628772Y2 (cs) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5552675Y2 (cs) * | 1976-04-14 | 1980-12-06 |
-
1978
- 1978-06-24 JP JP1978086121U patent/JPS5628772Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS554531U (cs) | 1980-01-12 |