JPS5628770Y2 - - Google Patents

Info

Publication number
JPS5628770Y2
JPS5628770Y2 JP10237176U JP10237176U JPS5628770Y2 JP S5628770 Y2 JPS5628770 Y2 JP S5628770Y2 JP 10237176 U JP10237176 U JP 10237176U JP 10237176 U JP10237176 U JP 10237176U JP S5628770 Y2 JPS5628770 Y2 JP S5628770Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10237176U
Other languages
Japanese (ja)
Other versions
JPS5320868U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10237176U priority Critical patent/JPS5628770Y2/ja
Publication of JPS5320868U publication Critical patent/JPS5320868U/ja
Application granted granted Critical
Publication of JPS5628770Y2 publication Critical patent/JPS5628770Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP10237176U 1976-07-30 1976-07-30 Expired JPS5628770Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10237176U JPS5628770Y2 (en:Method) 1976-07-30 1976-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10237176U JPS5628770Y2 (en:Method) 1976-07-30 1976-07-30

Publications (2)

Publication Number Publication Date
JPS5320868U JPS5320868U (en:Method) 1978-02-22
JPS5628770Y2 true JPS5628770Y2 (en:Method) 1981-07-08

Family

ID=28712564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10237176U Expired JPS5628770Y2 (en:Method) 1976-07-30 1976-07-30

Country Status (1)

Country Link
JP (1) JPS5628770Y2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56132249U (en:Method) * 1980-03-07 1981-10-07
JPS5930625B2 (ja) * 1980-04-24 1984-07-27 北川精機株式会社 単板仕組用スタツカ−

Also Published As

Publication number Publication date
JPS5320868U (en:Method) 1978-02-22

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