JPS5628630B2 - - Google Patents
Info
- Publication number
- JPS5628630B2 JPS5628630B2 JP6069973A JP6069973A JPS5628630B2 JP S5628630 B2 JPS5628630 B2 JP S5628630B2 JP 6069973 A JP6069973 A JP 6069973A JP 6069973 A JP6069973 A JP 6069973A JP S5628630 B2 JPS5628630 B2 JP S5628630B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6069973A JPS5628630B2 (zh) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6069973A JPS5628630B2 (zh) | 1973-05-30 | 1973-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS509198A JPS509198A (zh) | 1975-01-30 |
| JPS5628630B2 true JPS5628630B2 (zh) | 1981-07-03 |
Family
ID=13149790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6069973A Expired JPS5628630B2 (zh) | 1973-05-30 | 1973-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5628630B2 (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003025080A (ja) * | 2000-09-13 | 2003-01-28 | Hamamatsu Photonics Kk | レーザ加工方法 |
| US9711405B2 (en) | 2002-03-12 | 2017-07-18 | Hamamatsu Photonics K.K. | Substrate dividing method |
| US9837315B2 (en) | 2000-09-13 | 2017-12-05 | Hamamatsu Photonics K.K. | Laser processing method and laser processing apparatus |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56106646A (en) * | 1980-01-31 | 1981-08-25 | Tokyo Shibaura Electric Co | Laser knife for operation |
| JPS59193783A (ja) * | 1983-04-18 | 1984-11-02 | Mitsubishi Electric Corp | パイプ切断装置 |
| JPS60177987A (ja) * | 1984-02-24 | 1985-09-11 | Agency Of Ind Science & Technol | レ−ザ加工装置 |
| JPS6126878U (ja) * | 1984-07-24 | 1986-02-18 | 金剛株式会社 | 組立式収容室 |
-
1973
- 1973-05-30 JP JP6069973A patent/JPS5628630B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003025080A (ja) * | 2000-09-13 | 2003-01-28 | Hamamatsu Photonics Kk | レーザ加工方法 |
| JP4663952B2 (ja) * | 2000-09-13 | 2011-04-06 | 浜松ホトニクス株式会社 | レーザ加工装置及びレーザ加工方法 |
| US9837315B2 (en) | 2000-09-13 | 2017-12-05 | Hamamatsu Photonics K.K. | Laser processing method and laser processing apparatus |
| US9711405B2 (en) | 2002-03-12 | 2017-07-18 | Hamamatsu Photonics K.K. | Substrate dividing method |
| US10068801B2 (en) | 2002-03-12 | 2018-09-04 | Hamamatsu Photonics K.K. | Substrate dividing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS509198A (zh) | 1975-01-30 |