JPS5628600Y2 - - Google Patents
Info
- Publication number
- JPS5628600Y2 JPS5628600Y2 JP1976160650U JP16065076U JPS5628600Y2 JP S5628600 Y2 JPS5628600 Y2 JP S5628600Y2 JP 1976160650 U JP1976160650 U JP 1976160650U JP 16065076 U JP16065076 U JP 16065076U JP S5628600 Y2 JPS5628600 Y2 JP S5628600Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976160650U JPS5628600Y2 (https=) | 1976-11-30 | 1976-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976160650U JPS5628600Y2 (https=) | 1976-11-30 | 1976-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5376774U JPS5376774U (https=) | 1978-06-27 |
| JPS5628600Y2 true JPS5628600Y2 (https=) | 1981-07-07 |
Family
ID=28768511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976160650U Expired JPS5628600Y2 (https=) | 1976-11-30 | 1976-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5628600Y2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57122437A (en) * | 1981-01-23 | 1982-07-30 | Nec Corp | Glass mask |
| JPS638900Y2 (https=) * | 1987-04-23 | 1988-03-16 | ||
| JP7037445B2 (ja) * | 2018-06-26 | 2022-03-16 | クアーズテック株式会社 | Ｉｃまたはｌｃｄフォトリソグラフィ用のフォトマスク用基板 |
-
1976
- 1976-11-30 JP JP1976160650U patent/JPS5628600Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5376774U (https=) | 1978-06-27 |