JPS5628014B2 - - Google Patents
Info
- Publication number
- JPS5628014B2 JPS5628014B2 JP4670978A JP4670978A JPS5628014B2 JP S5628014 B2 JPS5628014 B2 JP S5628014B2 JP 4670978 A JP4670978 A JP 4670978A JP 4670978 A JP4670978 A JP 4670978A JP S5628014 B2 JPS5628014 B2 JP S5628014B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4670978A JPS54139481A (en) | 1978-04-21 | 1978-04-21 | Pressing/heating process device for semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4670978A JPS54139481A (en) | 1978-04-21 | 1978-04-21 | Pressing/heating process device for semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54139481A JPS54139481A (en) | 1979-10-29 |
| JPS5628014B2 true JPS5628014B2 (en) | 1981-06-29 |
Family
ID=12754878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4670978A Granted JPS54139481A (en) | 1978-04-21 | 1978-04-21 | Pressing/heating process device for semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54139481A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169207U (en) * | 1984-10-13 | 1986-05-12 | ||
| JPS6394904U (en) * | 1986-12-05 | 1988-06-18 |
-
1978
- 1978-04-21 JP JP4670978A patent/JPS54139481A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169207U (en) * | 1984-10-13 | 1986-05-12 | ||
| JPS6394904U (en) * | 1986-12-05 | 1988-06-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54139481A (en) | 1979-10-29 |