JPS562786B2 - - Google Patents

Info

Publication number
JPS562786B2
JPS562786B2 JP11515676A JP11515676A JPS562786B2 JP S562786 B2 JPS562786 B2 JP S562786B2 JP 11515676 A JP11515676 A JP 11515676A JP 11515676 A JP11515676 A JP 11515676A JP S562786 B2 JPS562786 B2 JP S562786B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11515676A
Other versions
JPS5340285A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11515676A priority Critical patent/JPS5340285A/ja
Publication of JPS5340285A publication Critical patent/JPS5340285A/ja
Publication of JPS562786B2 publication Critical patent/JPS562786B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11515676A 1976-09-25 1976-09-25 Detection method for position-matching error Granted JPS5340285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11515676A JPS5340285A (en) 1976-09-25 1976-09-25 Detection method for position-matching error

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11515676A JPS5340285A (en) 1976-09-25 1976-09-25 Detection method for position-matching error

Publications (2)

Publication Number Publication Date
JPS5340285A JPS5340285A (en) 1978-04-12
JPS562786B2 true JPS562786B2 (ja) 1981-01-21

Family

ID=14655701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11515676A Granted JPS5340285A (en) 1976-09-25 1976-09-25 Detection method for position-matching error

Country Status (1)

Country Link
JP (1) JPS5340285A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2534499Y2 (ja) * 1990-03-23 1997-04-30 シチズン時計株式会社 ステップモーターのステータ構造

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167329A (en) * 1980-05-29 1981-12-23 Nec Corp Piling joint setting mark to be used in fine processing exposure technology
JPS57166034A (en) * 1981-04-07 1982-10-13 Matsushita Electric Ind Co Ltd Positioning method
JPS616824A (ja) * 1984-06-20 1986-01-13 Nec Corp 半導体基板目合せ法
JP2637412B2 (ja) * 1987-02-25 1997-08-06 キヤノン株式会社 位置あわせ方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5147028A (ja) * 1974-10-21 1976-04-22 Fukuda Metal Foil Powder Dodenseitoryo

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5147028A (ja) * 1974-10-21 1976-04-22 Fukuda Metal Foil Powder Dodenseitoryo

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2534499Y2 (ja) * 1990-03-23 1997-04-30 シチズン時計株式会社 ステップモーターのステータ構造

Also Published As

Publication number Publication date
JPS5340285A (en) 1978-04-12

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