JPS562786B2 - - Google Patents
Info
- Publication number
- JPS562786B2 JPS562786B2 JP11515676A JP11515676A JPS562786B2 JP S562786 B2 JPS562786 B2 JP S562786B2 JP 11515676 A JP11515676 A JP 11515676A JP 11515676 A JP11515676 A JP 11515676A JP S562786 B2 JPS562786 B2 JP S562786B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11515676A JPS5340285A (en) | 1976-09-25 | 1976-09-25 | Detection method for position-matching error |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11515676A JPS5340285A (en) | 1976-09-25 | 1976-09-25 | Detection method for position-matching error |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5340285A JPS5340285A (en) | 1978-04-12 |
JPS562786B2 true JPS562786B2 (ja) | 1981-01-21 |
Family
ID=14655701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11515676A Granted JPS5340285A (en) | 1976-09-25 | 1976-09-25 | Detection method for position-matching error |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5340285A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2534499Y2 (ja) * | 1990-03-23 | 1997-04-30 | シチズン時計株式会社 | ステップモーターのステータ構造 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167329A (en) * | 1980-05-29 | 1981-12-23 | Nec Corp | Piling joint setting mark to be used in fine processing exposure technology |
JPS57166034A (en) * | 1981-04-07 | 1982-10-13 | Matsushita Electric Ind Co Ltd | Positioning method |
JPS616824A (ja) * | 1984-06-20 | 1986-01-13 | Nec Corp | 半導体基板目合せ法 |
JP2637412B2 (ja) * | 1987-02-25 | 1997-08-06 | キヤノン株式会社 | 位置あわせ方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5147028A (ja) * | 1974-10-21 | 1976-04-22 | Fukuda Metal Foil Powder | Dodenseitoryo |
-
1976
- 1976-09-25 JP JP11515676A patent/JPS5340285A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5147028A (ja) * | 1974-10-21 | 1976-04-22 | Fukuda Metal Foil Powder | Dodenseitoryo |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2534499Y2 (ja) * | 1990-03-23 | 1997-04-30 | シチズン時計株式会社 | ステップモーターのステータ構造 |
Also Published As
Publication number | Publication date |
---|---|
JPS5340285A (en) | 1978-04-12 |