JPS5627082B2 - - Google Patents

Info

Publication number
JPS5627082B2
JPS5627082B2 JP5278076A JP5278076A JPS5627082B2 JP S5627082 B2 JPS5627082 B2 JP S5627082B2 JP 5278076 A JP5278076 A JP 5278076A JP 5278076 A JP5278076 A JP 5278076A JP S5627082 B2 JPS5627082 B2 JP S5627082B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5278076A
Other languages
Japanese (ja)
Other versions
JPS52135886A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5278076A priority Critical patent/JPS52135886A/ja
Publication of JPS52135886A publication Critical patent/JPS52135886A/ja
Publication of JPS5627082B2 publication Critical patent/JPS5627082B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gas Separation By Absorption (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5278076A 1976-05-11 1976-05-11 Removal of oxygen gas and steam Granted JPS52135886A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5278076A JPS52135886A (en) 1976-05-11 1976-05-11 Removal of oxygen gas and steam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5278076A JPS52135886A (en) 1976-05-11 1976-05-11 Removal of oxygen gas and steam

Publications (2)

Publication Number Publication Date
JPS52135886A JPS52135886A (en) 1977-11-14
JPS5627082B2 true JPS5627082B2 (cs) 1981-06-23

Family

ID=12924356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5278076A Granted JPS52135886A (en) 1976-05-11 1976-05-11 Removal of oxygen gas and steam

Country Status (1)

Country Link
JP (1) JPS52135886A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288583U (cs) * 1988-12-27 1990-07-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288583U (cs) * 1988-12-27 1990-07-13

Also Published As

Publication number Publication date
JPS52135886A (en) 1977-11-14

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