JPS562702B2 - - Google Patents
Info
- Publication number
- JPS562702B2 JPS562702B2 JP9903473A JP9903473A JPS562702B2 JP S562702 B2 JPS562702 B2 JP S562702B2 JP 9903473 A JP9903473 A JP 9903473A JP 9903473 A JP9903473 A JP 9903473A JP S562702 B2 JPS562702 B2 JP S562702B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9903473A JPS562702B2 (cs) | 1973-09-03 | 1973-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9903473A JPS562702B2 (cs) | 1973-09-03 | 1973-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5048457A JPS5048457A (cs) | 1975-04-30 |
| JPS562702B2 true JPS562702B2 (cs) | 1981-01-21 |
Family
ID=14236091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9903473A Expired JPS562702B2 (cs) | 1973-09-03 | 1973-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS562702B2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5256870A (en) * | 1975-11-05 | 1977-05-10 | Yoshimura Oil Chem | Method of preventing erosion of etching |
-
1973
- 1973-09-03 JP JP9903473A patent/JPS562702B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5048457A (cs) | 1975-04-30 |