JPS5626982B2 - - Google Patents

Info

Publication number
JPS5626982B2
JPS5626982B2 JP1314678A JP1314678A JPS5626982B2 JP S5626982 B2 JPS5626982 B2 JP S5626982B2 JP 1314678 A JP1314678 A JP 1314678A JP 1314678 A JP1314678 A JP 1314678A JP S5626982 B2 JPS5626982 B2 JP S5626982B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1314678A
Other languages
Japanese (ja)
Other versions
JPS54106180A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1314678A priority Critical patent/JPS54106180A/en
Publication of JPS54106180A publication Critical patent/JPS54106180A/en
Publication of JPS5626982B2 publication Critical patent/JPS5626982B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP1314678A 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit Granted JPS54106180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1314678A JPS54106180A (en) 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1314678A JPS54106180A (en) 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS54106180A JPS54106180A (en) 1979-08-20
JPS5626982B2 true JPS5626982B2 (en) 1981-06-22

Family

ID=11825013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1314678A Granted JPS54106180A (en) 1978-02-08 1978-02-08 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS54106180A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100477A (en) * 1980-01-16 1981-08-12 Toshiba Corp Semiconductor device
JPS59920A (en) * 1982-06-23 1984-01-06 Fujitsu Ltd Manufacture of semiconductor device
JPH0397224A (en) * 1989-09-11 1991-04-23 Toshiba Corp Manufacture of semiconductor device
EP0430275A3 (en) * 1989-12-01 1993-10-27 Seiko Instr Inc Doping method of barrier region in semiconductor device
EP0505877A2 (en) * 1991-03-27 1992-09-30 Seiko Instruments Inc. Impurity doping method with adsorbed diffusion source
JPH0765778A (en) * 1993-08-20 1995-03-10 Tadahiro Omi Ion implanting device

Also Published As

Publication number Publication date
JPS54106180A (en) 1979-08-20

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