JPS5626982B2 - - Google Patents
Info
- Publication number
- JPS5626982B2 JPS5626982B2 JP1314678A JP1314678A JPS5626982B2 JP S5626982 B2 JPS5626982 B2 JP S5626982B2 JP 1314678 A JP1314678 A JP 1314678A JP 1314678 A JP1314678 A JP 1314678A JP S5626982 B2 JPS5626982 B2 JP S5626982B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1314678A JPS54106180A (en) | 1978-02-08 | 1978-02-08 | Manufacture of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1314678A JPS54106180A (en) | 1978-02-08 | 1978-02-08 | Manufacture of semiconductor integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54106180A JPS54106180A (en) | 1979-08-20 |
JPS5626982B2 true JPS5626982B2 (en) | 1981-06-22 |
Family
ID=11825013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1314678A Granted JPS54106180A (en) | 1978-02-08 | 1978-02-08 | Manufacture of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54106180A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56100477A (en) * | 1980-01-16 | 1981-08-12 | Toshiba Corp | Semiconductor device |
JPS59920A (en) * | 1982-06-23 | 1984-01-06 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH0397224A (en) * | 1989-09-11 | 1991-04-23 | Toshiba Corp | Manufacture of semiconductor device |
EP0430275A3 (en) * | 1989-12-01 | 1993-10-27 | Seiko Instr Inc | Doping method of barrier region in semiconductor device |
EP0505877A2 (en) * | 1991-03-27 | 1992-09-30 | Seiko Instruments Inc. | Impurity doping method with adsorbed diffusion source |
JPH0765778A (en) * | 1993-08-20 | 1995-03-10 | Tadahiro Omi | Ion implanting device |
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1978
- 1978-02-08 JP JP1314678A patent/JPS54106180A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS54106180A (en) | 1979-08-20 |