JPS5626978B2 - - Google Patents
Info
- Publication number
- JPS5626978B2 JPS5626978B2 JP4552072A JP4552072A JPS5626978B2 JP S5626978 B2 JPS5626978 B2 JP S5626978B2 JP 4552072 A JP4552072 A JP 4552072A JP 4552072 A JP4552072 A JP 4552072A JP S5626978 B2 JPS5626978 B2 JP S5626978B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4552072A JPS5626978B2 (en) | 1972-05-10 | 1972-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4552072A JPS5626978B2 (en) | 1972-05-10 | 1972-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS498179A JPS498179A (en) | 1974-01-24 |
| JPS5626978B2 true JPS5626978B2 (en) | 1981-06-22 |
Family
ID=12721678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4552072A Expired JPS5626978B2 (en) | 1972-05-10 | 1972-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5626978B2 (en) |
-
1972
- 1972-05-10 JP JP4552072A patent/JPS5626978B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS498179A (en) | 1974-01-24 |