JPS5626892B2 - - Google Patents

Info

Publication number
JPS5626892B2
JPS5626892B2 JP15047276A JP15047276A JPS5626892B2 JP S5626892 B2 JPS5626892 B2 JP S5626892B2 JP 15047276 A JP15047276 A JP 15047276A JP 15047276 A JP15047276 A JP 15047276A JP S5626892 B2 JPS5626892 B2 JP S5626892B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15047276A
Other languages
Japanese (ja)
Other versions
JPS5374005A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15047276A priority Critical patent/JPS5374005A/ja
Publication of JPS5374005A publication Critical patent/JPS5374005A/ja
Publication of JPS5626892B2 publication Critical patent/JPS5626892B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP15047276A 1976-12-14 1976-12-14 Manufacture of magnetic recording medium Granted JPS5374005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15047276A JPS5374005A (en) 1976-12-14 1976-12-14 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15047276A JPS5374005A (en) 1976-12-14 1976-12-14 Manufacture of magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS5374005A JPS5374005A (en) 1978-07-01
JPS5626892B2 true JPS5626892B2 (en:Method) 1981-06-22

Family

ID=15497643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15047276A Granted JPS5374005A (en) 1976-12-14 1976-12-14 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5374005A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823327A (ja) * 1981-07-31 1983-02-12 Tdk Corp 磁気記録媒体の製造方法
EP2253732A2 (en) 2004-09-03 2010-11-24 Cardinal CG Company Coater having interrupted conveyor system

Also Published As

Publication number Publication date
JPS5374005A (en) 1978-07-01

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