JPS5626892B2 - - Google Patents
Info
- Publication number
- JPS5626892B2 JPS5626892B2 JP15047276A JP15047276A JPS5626892B2 JP S5626892 B2 JPS5626892 B2 JP S5626892B2 JP 15047276 A JP15047276 A JP 15047276A JP 15047276 A JP15047276 A JP 15047276A JP S5626892 B2 JPS5626892 B2 JP S5626892B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Thin Magnetic Films (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15047276A JPS5374005A (en) | 1976-12-14 | 1976-12-14 | Manufacture of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15047276A JPS5374005A (en) | 1976-12-14 | 1976-12-14 | Manufacture of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5374005A JPS5374005A (en) | 1978-07-01 |
| JPS5626892B2 true JPS5626892B2 (OSRAM) | 1981-06-22 |
Family
ID=15497643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15047276A Granted JPS5374005A (en) | 1976-12-14 | 1976-12-14 | Manufacture of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5374005A (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5823327A (ja) * | 1981-07-31 | 1983-02-12 | Tdk Corp | 磁気記録媒体の製造方法 |
| EP2253732A2 (en) | 2004-09-03 | 2010-11-24 | Cardinal CG Company | Coater having interrupted conveyor system |
-
1976
- 1976-12-14 JP JP15047276A patent/JPS5374005A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5374005A (en) | 1978-07-01 |