JPS562659B2 - - Google Patents
Info
- Publication number
- JPS562659B2 JPS562659B2 JP864475A JP864475A JPS562659B2 JP S562659 B2 JPS562659 B2 JP S562659B2 JP 864475 A JP864475 A JP 864475A JP 864475 A JP864475 A JP 864475A JP S562659 B2 JPS562659 B2 JP S562659B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864475A JPS562659B2 (ja) | 1975-01-22 | 1975-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864475A JPS562659B2 (ja) | 1975-01-22 | 1975-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5184292A JPS5184292A (ja) | 1976-07-23 |
| JPS562659B2 true JPS562659B2 (ja) | 1981-01-21 |
Family
ID=11698646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP864475A Expired JPS562659B2 (ja) | 1975-01-22 | 1975-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS562659B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014077395A1 (ja) * | 2012-11-19 | 2014-05-22 | 東ソー株式会社 | 酸化物焼結体、それを用いたスパッタリングターゲット及び酸化物膜 |
-
1975
- 1975-01-22 JP JP864475A patent/JPS562659B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5184292A (ja) | 1976-07-23 |