JPS5626140B2 - - Google Patents
Info
- Publication number
- JPS5626140B2 JPS5626140B2 JP6905273A JP6905273A JPS5626140B2 JP S5626140 B2 JPS5626140 B2 JP S5626140B2 JP 6905273 A JP6905273 A JP 6905273A JP 6905273 A JP6905273 A JP 6905273A JP S5626140 B2 JPS5626140 B2 JP S5626140B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6905273A JPS5626140B2 (cs) | 1973-06-19 | 1973-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6905273A JPS5626140B2 (cs) | 1973-06-19 | 1973-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5017972A JPS5017972A (cs) | 1975-02-25 |
| JPS5626140B2 true JPS5626140B2 (cs) | 1981-06-17 |
Family
ID=13391400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6905273A Expired JPS5626140B2 (cs) | 1973-06-19 | 1973-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5626140B2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0713943B2 (ja) * | 1985-02-22 | 1995-02-15 | 株式会社東芝 | 半導体気相成長装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4841669A (cs) * | 1971-09-28 | 1973-06-18 |
-
1973
- 1973-06-19 JP JP6905273A patent/JPS5626140B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5017972A (cs) | 1975-02-25 |