JPS5624730U - - Google Patents
Info
- Publication number
- JPS5624730U JPS5624730U JP10493379U JP10493379U JPS5624730U JP S5624730 U JPS5624730 U JP S5624730U JP 10493379 U JP10493379 U JP 10493379U JP 10493379 U JP10493379 U JP 10493379U JP S5624730 U JPS5624730 U JP S5624730U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Reciprocating Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10493379U JPS6127857Y2 (en:Method) | 1979-07-30 | 1979-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10493379U JPS6127857Y2 (en:Method) | 1979-07-30 | 1979-07-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5624730U true JPS5624730U (en:Method) | 1981-03-06 |
| JPS6127857Y2 JPS6127857Y2 (en:Method) | 1986-08-19 |
Family
ID=29337606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10493379U Expired JPS6127857Y2 (en:Method) | 1979-07-30 | 1979-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127857Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61147528A (ja) * | 1984-12-21 | 1986-07-05 | Toshiba Corp | レジスト処理装置 |
-
1979
- 1979-07-30 JP JP10493379U patent/JPS6127857Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61147528A (ja) * | 1984-12-21 | 1986-07-05 | Toshiba Corp | レジスト処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6127857Y2 (en:Method) | 1986-08-19 |