JPS5623958B2 - - Google Patents
Info
- Publication number
- JPS5623958B2 JPS5623958B2 JP12641473A JP12641473A JPS5623958B2 JP S5623958 B2 JPS5623958 B2 JP S5623958B2 JP 12641473 A JP12641473 A JP 12641473A JP 12641473 A JP12641473 A JP 12641473A JP S5623958 B2 JPS5623958 B2 JP S5623958B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12641473A JPS5623958B2 (cs) | 1973-11-10 | 1973-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12641473A JPS5623958B2 (cs) | 1973-11-10 | 1973-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5079258A JPS5079258A (cs) | 1975-06-27 |
| JPS5623958B2 true JPS5623958B2 (cs) | 1981-06-03 |
Family
ID=14934562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12641473A Expired JPS5623958B2 (cs) | 1973-11-10 | 1973-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5623958B2 (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110764A (en) * | 1974-07-16 | 1976-01-28 | Nippon Telegraph & Telephone | Kagobutsuhandotaino seizohoho |
| JPS5775421A (en) * | 1980-10-28 | 1982-05-12 | Mitsubishi Monsanto Chem Co | Method of vapor growth compound semiconductor epitaxial film |
| JPS58108734A (ja) * | 1981-12-23 | 1983-06-28 | Fujitsu Ltd | 気相成長法 |
-
1973
- 1973-11-10 JP JP12641473A patent/JPS5623958B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5079258A (cs) | 1975-06-27 |