JPS5622981B2 - - Google Patents
Info
- Publication number
- JPS5622981B2 JPS5622981B2 JP14830474A JP14830474A JPS5622981B2 JP S5622981 B2 JPS5622981 B2 JP S5622981B2 JP 14830474 A JP14830474 A JP 14830474A JP 14830474 A JP14830474 A JP 14830474A JP S5622981 B2 JPS5622981 B2 JP S5622981B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inorganic Fibers (AREA)
- Nonwoven Fabrics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14830474A JPS5622981B2 (en) | 1974-12-26 | 1974-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14830474A JPS5622981B2 (en) | 1974-12-26 | 1974-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5175174A JPS5175174A (en) | 1976-06-29 |
| JPS5622981B2 true JPS5622981B2 (en) | 1981-05-28 |
Family
ID=15449781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14830474A Expired JPS5622981B2 (en) | 1974-12-26 | 1974-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5622981B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0171060B1 (en) * | 1993-12-28 | 1999-03-30 | 스기야마 카즈히코 | Manufacturing method of semiconductor device |
-
1974
- 1974-12-26 JP JP14830474A patent/JPS5622981B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5175174A (en) | 1976-06-29 |