JPS5622138B2 - - Google Patents

Info

Publication number
JPS5622138B2
JPS5622138B2 JP9435572A JP9435572A JPS5622138B2 JP S5622138 B2 JPS5622138 B2 JP S5622138B2 JP 9435572 A JP9435572 A JP 9435572A JP 9435572 A JP9435572 A JP 9435572A JP S5622138 B2 JPS5622138 B2 JP S5622138B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9435572A
Other languages
Japanese (ja)
Other versions
JPS4952580A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9435572A priority Critical patent/JPS5622138B2/ja
Publication of JPS4952580A publication Critical patent/JPS4952580A/ja
Publication of JPS5622138B2 publication Critical patent/JPS5622138B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/0711Apparatus therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/0711Apparatus therefor
    • H10W72/07141Means for applying energy, e.g. ovens or lasers

Landscapes

  • Wire Bonding (AREA)
JP9435572A 1972-09-20 1972-09-20 Expired JPS5622138B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9435572A JPS5622138B2 (https=) 1972-09-20 1972-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9435572A JPS5622138B2 (https=) 1972-09-20 1972-09-20

Publications (2)

Publication Number Publication Date
JPS4952580A JPS4952580A (https=) 1974-05-22
JPS5622138B2 true JPS5622138B2 (https=) 1981-05-23

Family

ID=14107966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9435572A Expired JPS5622138B2 (https=) 1972-09-20 1972-09-20

Country Status (1)

Country Link
JP (1) JPS5622138B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759324A (en) * 1980-09-26 1982-04-09 Toshiba Corp Device for exposure of electron beam

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313804B2 (https=) * 1973-06-07 1978-05-12

Also Published As

Publication number Publication date
JPS4952580A (https=) 1974-05-22

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