JPS5622138B2 - - Google Patents

Info

Publication number
JPS5622138B2
JPS5622138B2 JP9435572A JP9435572A JPS5622138B2 JP S5622138 B2 JPS5622138 B2 JP S5622138B2 JP 9435572 A JP9435572 A JP 9435572A JP 9435572 A JP9435572 A JP 9435572A JP S5622138 B2 JPS5622138 B2 JP S5622138B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9435572A
Other languages
Japanese (ja)
Other versions
JPS4952580A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9435572A priority Critical patent/JPS5622138B2/ja
Publication of JPS4952580A publication Critical patent/JPS4952580A/ja
Publication of JPS5622138B2 publication Critical patent/JPS5622138B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07141—Means for applying energy, e.g. ovens or lasers

Landscapes

  • Wire Bonding (AREA)
JP9435572A 1972-09-20 1972-09-20 Expired JPS5622138B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9435572A JPS5622138B2 (cs) 1972-09-20 1972-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9435572A JPS5622138B2 (cs) 1972-09-20 1972-09-20

Publications (2)

Publication Number Publication Date
JPS4952580A JPS4952580A (cs) 1974-05-22
JPS5622138B2 true JPS5622138B2 (cs) 1981-05-23

Family

ID=14107966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9435572A Expired JPS5622138B2 (cs) 1972-09-20 1972-09-20

Country Status (1)

Country Link
JP (1) JPS5622138B2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759324A (en) * 1980-09-26 1982-04-09 Toshiba Corp Device for exposure of electron beam

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313804B2 (cs) * 1973-06-07 1978-05-12

Also Published As

Publication number Publication date
JPS4952580A (cs) 1974-05-22

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