JPS5621439U - - Google Patents

Info

Publication number
JPS5621439U
JPS5621439U JP10469379U JP10469379U JPS5621439U JP S5621439 U JPS5621439 U JP S5621439U JP 10469379 U JP10469379 U JP 10469379U JP 10469379 U JP10469379 U JP 10469379U JP S5621439 U JPS5621439 U JP S5621439U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10469379U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10469379U priority Critical patent/JPS5621439U/ja
Publication of JPS5621439U publication Critical patent/JPS5621439U/ja
Pending legal-status Critical Current

Links

JP10469379U 1979-07-27 1979-07-27 Pending JPS5621439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10469379U JPS5621439U (ja) 1979-07-27 1979-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10469379U JPS5621439U (ja) 1979-07-27 1979-07-27

Publications (1)

Publication Number Publication Date
JPS5621439U true JPS5621439U (ja) 1981-02-25

Family

ID=29337372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10469379U Pending JPS5621439U (ja) 1979-07-27 1979-07-27

Country Status (1)

Country Link
JP (1) JPS5621439U (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS61290713A (ja) * 1985-06-19 1986-12-20 Hitachi Ltd 処理装置
JPS6316096U (ja) * 1986-07-17 1988-02-02
JPH08241870A (ja) * 1996-03-25 1996-09-17 Hitachi Ltd 半導体ウエハ加熱装置
US6332927B1 (en) 1996-06-24 2001-12-25 Kokusai Electric Co., Ltd. Substrate processing apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS61290713A (ja) * 1985-06-19 1986-12-20 Hitachi Ltd 処理装置
JPS6316096U (ja) * 1986-07-17 1988-02-02
JPH08241870A (ja) * 1996-03-25 1996-09-17 Hitachi Ltd 半導体ウエハ加熱装置
US6332927B1 (en) 1996-06-24 2001-12-25 Kokusai Electric Co., Ltd. Substrate processing apparatus

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