JPS5621068B2 - - Google Patents
Info
- Publication number
- JPS5621068B2 JPS5621068B2 JP14810874A JP14810874A JPS5621068B2 JP S5621068 B2 JPS5621068 B2 JP S5621068B2 JP 14810874 A JP14810874 A JP 14810874A JP 14810874 A JP14810874 A JP 14810874A JP S5621068 B2 JPS5621068 B2 JP S5621068B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14810874A JPS5621068B2 (https=) | 1974-12-25 | 1974-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14810874A JPS5621068B2 (https=) | 1974-12-25 | 1974-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5173981A JPS5173981A (https=) | 1976-06-26 |
| JPS5621068B2 true JPS5621068B2 (https=) | 1981-05-16 |
Family
ID=15445416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14810874A Expired JPS5621068B2 (https=) | 1974-12-25 | 1974-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5621068B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53138989A (en) * | 1977-05-10 | 1978-12-04 | Koyo Seiko Co | Ion plating method |
| JPS54139891A (en) * | 1978-04-24 | 1979-10-30 | Nagaoka Kk | Specific work metal material and its manufacturing method |
| JPS60234965A (ja) * | 1984-05-04 | 1985-11-21 | Diesel Kiki Co Ltd | 薄膜製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS495836A (https=) * | 1973-03-20 | 1974-01-19 |
-
1974
- 1974-12-25 JP JP14810874A patent/JPS5621068B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5173981A (https=) | 1976-06-26 |