JPS5621068B2 - - Google Patents

Info

Publication number
JPS5621068B2
JPS5621068B2 JP14810874A JP14810874A JPS5621068B2 JP S5621068 B2 JPS5621068 B2 JP S5621068B2 JP 14810874 A JP14810874 A JP 14810874A JP 14810874 A JP14810874 A JP 14810874A JP S5621068 B2 JPS5621068 B2 JP S5621068B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14810874A
Other languages
Japanese (ja)
Other versions
JPS5173981A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14810874A priority Critical patent/JPS5621068B2/ja
Publication of JPS5173981A publication Critical patent/JPS5173981A/ja
Publication of JPS5621068B2 publication Critical patent/JPS5621068B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
JP14810874A 1974-12-25 1974-12-25 Expired JPS5621068B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14810874A JPS5621068B2 (enrdf_load_stackoverflow) 1974-12-25 1974-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14810874A JPS5621068B2 (enrdf_load_stackoverflow) 1974-12-25 1974-12-25

Publications (2)

Publication Number Publication Date
JPS5173981A JPS5173981A (enrdf_load_stackoverflow) 1976-06-26
JPS5621068B2 true JPS5621068B2 (enrdf_load_stackoverflow) 1981-05-16

Family

ID=15445416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14810874A Expired JPS5621068B2 (enrdf_load_stackoverflow) 1974-12-25 1974-12-25

Country Status (1)

Country Link
JP (1) JPS5621068B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138989A (en) * 1977-05-10 1978-12-04 Koyo Seiko Co Ion plating method
JPS54139891A (en) * 1978-04-24 1979-10-30 Nagaoka Kk Specific work metal material and its manufacturing method
JPS60234965A (ja) * 1984-05-04 1985-11-21 Diesel Kiki Co Ltd 薄膜製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495836A (enrdf_load_stackoverflow) * 1973-03-20 1974-01-19

Also Published As

Publication number Publication date
JPS5173981A (enrdf_load_stackoverflow) 1976-06-26

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