JPS5620691B2 - - Google Patents

Info

Publication number
JPS5620691B2
JPS5620691B2 JP9242277A JP9242277A JPS5620691B2 JP S5620691 B2 JPS5620691 B2 JP S5620691B2 JP 9242277 A JP9242277 A JP 9242277A JP 9242277 A JP9242277 A JP 9242277A JP S5620691 B2 JPS5620691 B2 JP S5620691B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9242277A
Other languages
Japanese (ja)
Other versions
JPS5426666A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9242277A priority Critical patent/JPS5426666A/ja
Publication of JPS5426666A publication Critical patent/JPS5426666A/ja
Publication of JPS5620691B2 publication Critical patent/JPS5620691B2/ja
Granted legal-status Critical Current

Links

JP9242277A 1977-07-29 1977-07-29 Positioning method of semiconductor wafer Granted JPS5426666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9242277A JPS5426666A (en) 1977-07-29 1977-07-29 Positioning method of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9242277A JPS5426666A (en) 1977-07-29 1977-07-29 Positioning method of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS5426666A JPS5426666A (en) 1979-02-28
JPS5620691B2 true JPS5620691B2 (enrdf_load_html_response) 1981-05-15

Family

ID=14053974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9242277A Granted JPS5426666A (en) 1977-07-29 1977-07-29 Positioning method of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5426666A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472477U (enrdf_load_html_response) * 1977-10-31 1979-05-23
JPS5785285A (en) * 1980-11-17 1982-05-27 Fujitsu Ltd Method of positioning board for carrying mask exposure device
CA1219818A (en) * 1984-03-12 1987-03-31 Roy E. Smith Brake disc design for wheel mounted discs

Also Published As

Publication number Publication date
JPS5426666A (en) 1979-02-28

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