JPS5620691B2 - - Google Patents
Info
- Publication number
- JPS5620691B2 JPS5620691B2 JP9242277A JP9242277A JPS5620691B2 JP S5620691 B2 JPS5620691 B2 JP S5620691B2 JP 9242277 A JP9242277 A JP 9242277A JP 9242277 A JP9242277 A JP 9242277A JP S5620691 B2 JPS5620691 B2 JP S5620691B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9242277A JPS5426666A (en) | 1977-07-29 | 1977-07-29 | Positioning method of semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9242277A JPS5426666A (en) | 1977-07-29 | 1977-07-29 | Positioning method of semiconductor wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5426666A JPS5426666A (en) | 1979-02-28 |
| JPS5620691B2 true JPS5620691B2 (OSRAM) | 1981-05-15 |
Family
ID=14053974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9242277A Granted JPS5426666A (en) | 1977-07-29 | 1977-07-29 | Positioning method of semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5426666A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5472477U (OSRAM) * | 1977-10-31 | 1979-05-23 | ||
| JPS5785285A (en) * | 1980-11-17 | 1982-05-27 | Fujitsu Ltd | Method of positioning board for carrying mask exposure device |
| CA1219818A (en) * | 1984-03-12 | 1987-03-31 | Roy E. Smith | Brake disc design for wheel mounted discs |
-
1977
- 1977-07-29 JP JP9242277A patent/JPS5426666A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5426666A (en) | 1979-02-28 |