JPS5620541B2 - - Google Patents
Info
- Publication number
- JPS5620541B2 JPS5620541B2 JP2947377A JP2947377A JPS5620541B2 JP S5620541 B2 JPS5620541 B2 JP S5620541B2 JP 2947377 A JP2947377 A JP 2947377A JP 2947377 A JP2947377 A JP 2947377A JP S5620541 B2 JPS5620541 B2 JP S5620541B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2947377A JPS53115301A (en) | 1977-03-17 | 1977-03-17 | Method of treating hard film of water soluble photoresist pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2947377A JPS53115301A (en) | 1977-03-17 | 1977-03-17 | Method of treating hard film of water soluble photoresist pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53115301A JPS53115301A (en) | 1978-10-07 |
JPS5620541B2 true JPS5620541B2 (en) | 1981-05-14 |
Family
ID=12277058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2947377A Granted JPS53115301A (en) | 1977-03-17 | 1977-03-17 | Method of treating hard film of water soluble photoresist pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53115301A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4125650A (en) * | 1977-08-08 | 1978-11-14 | International Business Machines Corporation | Resist image hardening process |
JP4588551B2 (en) | 2005-06-16 | 2010-12-01 | 富士通株式会社 | Resist composition, method for forming resist pattern, semiconductor device and method for manufacturing the same |
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1977
- 1977-03-17 JP JP2947377A patent/JPS53115301A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS53115301A (en) | 1978-10-07 |