JPS5620541B2 - - Google Patents

Info

Publication number
JPS5620541B2
JPS5620541B2 JP2947377A JP2947377A JPS5620541B2 JP S5620541 B2 JPS5620541 B2 JP S5620541B2 JP 2947377 A JP2947377 A JP 2947377A JP 2947377 A JP2947377 A JP 2947377A JP S5620541 B2 JPS5620541 B2 JP S5620541B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2947377A
Other languages
Japanese (ja)
Other versions
JPS53115301A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2947377A priority Critical patent/JPS53115301A/en
Publication of JPS53115301A publication Critical patent/JPS53115301A/en
Publication of JPS5620541B2 publication Critical patent/JPS5620541B2/ja
Granted legal-status Critical Current

Links

JP2947377A 1977-03-17 1977-03-17 Method of treating hard film of water soluble photoresist pattern Granted JPS53115301A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2947377A JPS53115301A (en) 1977-03-17 1977-03-17 Method of treating hard film of water soluble photoresist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2947377A JPS53115301A (en) 1977-03-17 1977-03-17 Method of treating hard film of water soluble photoresist pattern

Publications (2)

Publication Number Publication Date
JPS53115301A JPS53115301A (en) 1978-10-07
JPS5620541B2 true JPS5620541B2 (en) 1981-05-14

Family

ID=12277058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2947377A Granted JPS53115301A (en) 1977-03-17 1977-03-17 Method of treating hard film of water soluble photoresist pattern

Country Status (1)

Country Link
JP (1) JPS53115301A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4125650A (en) * 1977-08-08 1978-11-14 International Business Machines Corporation Resist image hardening process
JP4588551B2 (en) 2005-06-16 2010-12-01 富士通株式会社 Resist composition, method for forming resist pattern, semiconductor device and method for manufacturing the same

Also Published As

Publication number Publication date
JPS53115301A (en) 1978-10-07

Similar Documents

Publication Publication Date Title
JPS5649452B2 (en)
DE2817076C2 (en)
FR2377159B1 (en)
DE2831684C2 (en)
DE2734599C3 (en)
AU3353778A (en)
FR2377038B1 (en)
JPS5620541B2 (en)
DE2702077C2 (en)
AR210643A1 (en)
AU495917B2 (en)
AU71461S (en)
BE871419A (en)
BG24713A1 (en)
BG25855A1 (en)
BG25838A1 (en)
BG25839A1 (en)
BG25860A1 (en)
BG25809A1 (en)
BE851449A (en)
BE865722A (en)
BE866391A (en)
BE868323A (en)
BE870787A (en)
BG25837A1 (en)