JPS5620308Y2 - - Google Patents

Info

Publication number
JPS5620308Y2
JPS5620308Y2 JP1976058472U JP5847276U JPS5620308Y2 JP S5620308 Y2 JPS5620308 Y2 JP S5620308Y2 JP 1976058472 U JP1976058472 U JP 1976058472U JP 5847276 U JP5847276 U JP 5847276U JP S5620308 Y2 JPS5620308 Y2 JP S5620308Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976058472U
Other languages
Japanese (ja)
Other versions
JPS52150137U (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976058472U priority Critical patent/JPS5620308Y2/ja
Publication of JPS52150137U publication Critical patent/JPS52150137U/ja
Application granted granted Critical
Publication of JPS5620308Y2 publication Critical patent/JPS5620308Y2/ja
Expired legal-status Critical Current

Links

JP1976058472U 1976-05-11 1976-05-11 Expired JPS5620308Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976058472U JPS5620308Y2 (fi) 1976-05-11 1976-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976058472U JPS5620308Y2 (fi) 1976-05-11 1976-05-11

Publications (2)

Publication Number Publication Date
JPS52150137U JPS52150137U (fi) 1977-11-14
JPS5620308Y2 true JPS5620308Y2 (fi) 1981-05-14

Family

ID=28517642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976058472U Expired JPS5620308Y2 (fi) 1976-05-11 1976-05-11

Country Status (1)

Country Link
JP (1) JPS5620308Y2 (fi)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5751574Y2 (fi) * 1977-05-06 1982-11-10

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258473A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Production of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258473A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS52150137U (fi) 1977-11-14

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