JPS5620308Y2 - - Google Patents
Info
- Publication number
- JPS5620308Y2 JPS5620308Y2 JP1976058472U JP5847276U JPS5620308Y2 JP S5620308 Y2 JPS5620308 Y2 JP S5620308Y2 JP 1976058472 U JP1976058472 U JP 1976058472U JP 5847276 U JP5847276 U JP 5847276U JP S5620308 Y2 JPS5620308 Y2 JP S5620308Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976058472U JPS5620308Y2 (en:Method) | 1976-05-11 | 1976-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976058472U JPS5620308Y2 (en:Method) | 1976-05-11 | 1976-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52150137U JPS52150137U (en:Method) | 1977-11-14 |
| JPS5620308Y2 true JPS5620308Y2 (en:Method) | 1981-05-14 |
Family
ID=28517642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976058472U Expired JPS5620308Y2 (en:Method) | 1976-05-11 | 1976-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5620308Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5751574Y2 (en:Method) * | 1977-05-06 | 1982-11-10 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258473A (en) * | 1975-11-10 | 1977-05-13 | Hitachi Ltd | Production of semiconductor device |
-
1976
- 1976-05-11 JP JP1976058472U patent/JPS5620308Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52150137U (en:Method) | 1977-11-14 |