JPS5620114B2 - - Google Patents

Info

Publication number
JPS5620114B2
JPS5620114B2 JP9610572A JP9610572A JPS5620114B2 JP S5620114 B2 JPS5620114 B2 JP S5620114B2 JP 9610572 A JP9610572 A JP 9610572A JP 9610572 A JP9610572 A JP 9610572A JP S5620114 B2 JPS5620114 B2 JP S5620114B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9610572A
Other languages
Japanese (ja)
Other versions
JPS4953374A (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9610572A priority Critical patent/JPS5620114B2/ja
Publication of JPS4953374A publication Critical patent/JPS4953374A/ja
Publication of JPS5620114B2 publication Critical patent/JPS5620114B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Dicing (AREA)
JP9610572A 1972-09-27 1972-09-27 Expired JPS5620114B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9610572A JPS5620114B2 (ko) 1972-09-27 1972-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9610572A JPS5620114B2 (ko) 1972-09-27 1972-09-27

Publications (2)

Publication Number Publication Date
JPS4953374A JPS4953374A (ko) 1974-05-23
JPS5620114B2 true JPS5620114B2 (ko) 1981-05-12

Family

ID=14156094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9610572A Expired JPS5620114B2 (ko) 1972-09-27 1972-09-27

Country Status (1)

Country Link
JP (1) JPS5620114B2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6279909U (ko) * 1985-11-07 1987-05-22
JPS645124Y2 (ko) * 1984-12-04 1989-02-09

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5178169A (ko) * 1974-12-28 1976-07-07 New Nippon Electric Co

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645124Y2 (ko) * 1984-12-04 1989-02-09
JPS6279909U (ko) * 1985-11-07 1987-05-22

Also Published As

Publication number Publication date
JPS4953374A (ko) 1974-05-23

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