JPS5619934B2 - - Google Patents
Info
- Publication number
- JPS5619934B2 JPS5619934B2 JP13831675A JP13831675A JPS5619934B2 JP S5619934 B2 JPS5619934 B2 JP S5619934B2 JP 13831675 A JP13831675 A JP 13831675A JP 13831675 A JP13831675 A JP 13831675A JP S5619934 B2 JPS5619934 B2 JP S5619934B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50138316A JPS5261796A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50138316A JPS5261796A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5261796A JPS5261796A (en) | 1977-05-21 |
| JPS5619934B2 true JPS5619934B2 (en) | 1981-05-11 |
Family
ID=15219033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50138316A Granted JPS5261796A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5261796A (en) |
-
1975
- 1975-11-17 JP JP50138316A patent/JPS5261796A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5261796A (en) | 1977-05-21 |