JPS5619716U - - Google Patents

Info

Publication number
JPS5619716U
JPS5619716U JP10200679U JP10200679U JPS5619716U JP S5619716 U JPS5619716 U JP S5619716U JP 10200679 U JP10200679 U JP 10200679U JP 10200679 U JP10200679 U JP 10200679U JP S5619716 U JPS5619716 U JP S5619716U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10200679U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10200679U priority Critical patent/JPS5619716U/ja
Publication of JPS5619716U publication Critical patent/JPS5619716U/ja
Pending legal-status Critical Current

Links

JP10200679U 1979-07-24 1979-07-24 Pending JPS5619716U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10200679U JPS5619716U (en) 1979-07-24 1979-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10200679U JPS5619716U (en) 1979-07-24 1979-07-24

Publications (1)

Publication Number Publication Date
JPS5619716U true JPS5619716U (en) 1981-02-21

Family

ID=29334747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10200679U Pending JPS5619716U (en) 1979-07-24 1979-07-24

Country Status (1)

Country Link
JP (1) JPS5619716U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62192589A (en) * 1986-02-18 1987-08-24 Asahi Chem Ind Co Ltd Dry etching method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834560A (en) * 1971-09-06 1973-05-19
JPS5335617U (en) * 1976-08-31 1978-03-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834560A (en) * 1971-09-06 1973-05-19
JPS5335617U (en) * 1976-08-31 1978-03-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62192589A (en) * 1986-02-18 1987-08-24 Asahi Chem Ind Co Ltd Dry etching method

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