JPS5619716U - - Google Patents
Info
- Publication number
- JPS5619716U JPS5619716U JP10200679U JP10200679U JPS5619716U JP S5619716 U JPS5619716 U JP S5619716U JP 10200679 U JP10200679 U JP 10200679U JP 10200679 U JP10200679 U JP 10200679U JP S5619716 U JPS5619716 U JP S5619716U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10200679U JPS5619716U (en) | 1979-07-24 | 1979-07-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10200679U JPS5619716U (en) | 1979-07-24 | 1979-07-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5619716U true JPS5619716U (en) | 1981-02-21 |
Family
ID=29334747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10200679U Pending JPS5619716U (en) | 1979-07-24 | 1979-07-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5619716U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62192589A (en) * | 1986-02-18 | 1987-08-24 | Asahi Chem Ind Co Ltd | Dry etching method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834560A (en) * | 1971-09-06 | 1973-05-19 | ||
JPS5335617U (en) * | 1976-08-31 | 1978-03-29 |
-
1979
- 1979-07-24 JP JP10200679U patent/JPS5619716U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834560A (en) * | 1971-09-06 | 1973-05-19 | ||
JPS5335617U (en) * | 1976-08-31 | 1978-03-29 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62192589A (en) * | 1986-02-18 | 1987-08-24 | Asahi Chem Ind Co Ltd | Dry etching method |