JPS5619467Y2 - - Google Patents

Info

Publication number
JPS5619467Y2
JPS5619467Y2 JP1976015627U JP1562776U JPS5619467Y2 JP S5619467 Y2 JPS5619467 Y2 JP S5619467Y2 JP 1976015627 U JP1976015627 U JP 1976015627U JP 1562776 U JP1562776 U JP 1562776U JP S5619467 Y2 JPS5619467 Y2 JP S5619467Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976015627U
Other languages
Japanese (ja)
Other versions
JPS52107547U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976015627U priority Critical patent/JPS5619467Y2/ja
Publication of JPS52107547U publication Critical patent/JPS52107547U/ja
Application granted granted Critical
Publication of JPS5619467Y2 publication Critical patent/JPS5619467Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP1976015627U 1976-02-12 1976-02-12 Expired JPS5619467Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976015627U JPS5619467Y2 (ko) 1976-02-12 1976-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976015627U JPS5619467Y2 (ko) 1976-02-12 1976-02-12

Publications (2)

Publication Number Publication Date
JPS52107547U JPS52107547U (ko) 1977-08-16
JPS5619467Y2 true JPS5619467Y2 (ko) 1981-05-08

Family

ID=28475845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976015627U Expired JPS5619467Y2 (ko) 1976-02-12 1976-02-12

Country Status (1)

Country Link
JP (1) JPS5619467Y2 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5749452Y2 (ko) * 1977-09-02 1982-10-29
DE102007028288B4 (de) * 2007-06-20 2013-06-06 Epcos Ag Mit akustischen Wellen arbeitendes MEMS Bauelement und Verfahren zur Herstellung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (ko) * 1973-09-18 1975-05-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (ko) * 1973-09-18 1975-05-19

Also Published As

Publication number Publication date
JPS52107547U (ko) 1977-08-16

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