JPS5619402Y2 - - Google Patents
Info
- Publication number
- JPS5619402Y2 JPS5619402Y2 JP17955375U JP17955375U JPS5619402Y2 JP S5619402 Y2 JPS5619402 Y2 JP S5619402Y2 JP 17955375 U JP17955375 U JP 17955375U JP 17955375 U JP17955375 U JP 17955375U JP S5619402 Y2 JPS5619402 Y2 JP S5619402Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17955375U JPS5619402Y2 (en:Method) | 1975-12-31 | 1975-12-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17955375U JPS5619402Y2 (en:Method) | 1975-12-31 | 1975-12-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5292666U JPS5292666U (en:Method) | 1977-07-11 |
| JPS5619402Y2 true JPS5619402Y2 (en:Method) | 1981-05-08 |
Family
ID=28657805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17955375U Expired JPS5619402Y2 (en:Method) | 1975-12-31 | 1975-12-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5619402Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5718743Y2 (en:Method) * | 1978-05-08 | 1982-04-20 |
-
1975
- 1975-12-31 JP JP17955375U patent/JPS5619402Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5292666U (en:Method) | 1977-07-11 |