JPS5618633Y2 - - Google Patents
Info
- Publication number
- JPS5618633Y2 JPS5618633Y2 JP14689476U JP14689476U JPS5618633Y2 JP S5618633 Y2 JPS5618633 Y2 JP S5618633Y2 JP 14689476 U JP14689476 U JP 14689476U JP 14689476 U JP14689476 U JP 14689476U JP S5618633 Y2 JPS5618633 Y2 JP S5618633Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14689476U JPS5618633Y2 (oth) | 1976-11-02 | 1976-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14689476U JPS5618633Y2 (oth) | 1976-11-02 | 1976-11-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5364148U JPS5364148U (oth) | 1978-05-30 |
| JPS5618633Y2 true JPS5618633Y2 (oth) | 1981-05-01 |
Family
ID=28755359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14689476U Expired JPS5618633Y2 (oth) | 1976-11-02 | 1976-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5618633Y2 (oth) |
-
1976
- 1976-11-02 JP JP14689476U patent/JPS5618633Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5364148U (oth) | 1978-05-30 |