JPS5617950Y2 - - Google Patents
Info
- Publication number
- JPS5617950Y2 JPS5617950Y2 JP4031276U JP4031276U JPS5617950Y2 JP S5617950 Y2 JPS5617950 Y2 JP S5617950Y2 JP 4031276 U JP4031276 U JP 4031276U JP 4031276 U JP4031276 U JP 4031276U JP S5617950 Y2 JPS5617950 Y2 JP S5617950Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4031276U JPS5617950Y2 (en:Method) | 1976-04-01 | 1976-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4031276U JPS5617950Y2 (en:Method) | 1976-04-01 | 1976-04-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52131958U JPS52131958U (en:Method) | 1977-10-06 |
| JPS5617950Y2 true JPS5617950Y2 (en:Method) | 1981-04-27 |
Family
ID=28499442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4031276U Expired JPS5617950Y2 (en:Method) | 1976-04-01 | 1976-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5617950Y2 (en:Method) |
-
1976
- 1976-04-01 JP JP4031276U patent/JPS5617950Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52131958U (en:Method) | 1977-10-06 |