JPS561778B2 - - Google Patents
Info
- Publication number
- JPS561778B2 JPS561778B2 JP3396376A JP3396376A JPS561778B2 JP S561778 B2 JPS561778 B2 JP S561778B2 JP 3396376 A JP3396376 A JP 3396376A JP 3396376 A JP3396376 A JP 3396376A JP S561778 B2 JPS561778 B2 JP S561778B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3396376A JPS52116177A (en) | 1976-03-26 | 1976-03-26 | Laser beam exposure unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3396376A JPS52116177A (en) | 1976-03-26 | 1976-03-26 | Laser beam exposure unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52116177A JPS52116177A (en) | 1977-09-29 |
| JPS561778B2 true JPS561778B2 (Direct) | 1981-01-16 |
Family
ID=12401135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3396376A Granted JPS52116177A (en) | 1976-03-26 | 1976-03-26 | Laser beam exposure unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52116177A (Direct) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0686094B2 (ja) * | 1992-06-01 | 1994-11-02 | 大阪府 | 光学的造形法 |
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1976
- 1976-03-26 JP JP3396376A patent/JPS52116177A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52116177A (en) | 1977-09-29 |