JPS561725Y2 - - Google Patents

Info

Publication number
JPS561725Y2
JPS561725Y2 JP7989776U JP7989776U JPS561725Y2 JP S561725 Y2 JPS561725 Y2 JP S561725Y2 JP 7989776 U JP7989776 U JP 7989776U JP 7989776 U JP7989776 U JP 7989776U JP S561725 Y2 JPS561725 Y2 JP S561725Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7989776U
Other languages
Japanese (ja)
Other versions
JPS52170853U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7989776U priority Critical patent/JPS561725Y2/ja
Publication of JPS52170853U publication Critical patent/JPS52170853U/ja
Application granted granted Critical
Publication of JPS561725Y2 publication Critical patent/JPS561725Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7989776U 1976-06-18 1976-06-18 Expired JPS561725Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7989776U JPS561725Y2 (fr) 1976-06-18 1976-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7989776U JPS561725Y2 (fr) 1976-06-18 1976-06-18

Publications (2)

Publication Number Publication Date
JPS52170853U JPS52170853U (fr) 1977-12-26
JPS561725Y2 true JPS561725Y2 (fr) 1981-01-16

Family

ID=28558172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7989776U Expired JPS561725Y2 (fr) 1976-06-18 1976-06-18

Country Status (1)

Country Link
JP (1) JPS561725Y2 (fr)

Also Published As

Publication number Publication date
JPS52170853U (fr) 1977-12-26

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