JPS561725Y2 - - Google Patents

Info

Publication number
JPS561725Y2
JPS561725Y2 JP7989776U JP7989776U JPS561725Y2 JP S561725 Y2 JPS561725 Y2 JP S561725Y2 JP 7989776 U JP7989776 U JP 7989776U JP 7989776 U JP7989776 U JP 7989776U JP S561725 Y2 JPS561725 Y2 JP S561725Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7989776U
Other languages
Japanese (ja)
Other versions
JPS52170853U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7989776U priority Critical patent/JPS561725Y2/ja
Publication of JPS52170853U publication Critical patent/JPS52170853U/ja
Application granted granted Critical
Publication of JPS561725Y2 publication Critical patent/JPS561725Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7989776U 1976-06-18 1976-06-18 Expired JPS561725Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7989776U JPS561725Y2 (enrdf_load_stackoverflow) 1976-06-18 1976-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7989776U JPS561725Y2 (enrdf_load_stackoverflow) 1976-06-18 1976-06-18

Publications (2)

Publication Number Publication Date
JPS52170853U JPS52170853U (enrdf_load_stackoverflow) 1977-12-26
JPS561725Y2 true JPS561725Y2 (enrdf_load_stackoverflow) 1981-01-16

Family

ID=28558172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7989776U Expired JPS561725Y2 (enrdf_load_stackoverflow) 1976-06-18 1976-06-18

Country Status (1)

Country Link
JP (1) JPS561725Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS52170853U (enrdf_load_stackoverflow) 1977-12-26

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