JPS561724Y2 - - Google Patents

Info

Publication number
JPS561724Y2
JPS561724Y2 JP1975153573U JP15357375U JPS561724Y2 JP S561724 Y2 JPS561724 Y2 JP S561724Y2 JP 1975153573 U JP1975153573 U JP 1975153573U JP 15357375 U JP15357375 U JP 15357375U JP S561724 Y2 JPS561724 Y2 JP S561724Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975153573U
Other languages
Japanese (ja)
Other versions
JPS5266757U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975153573U priority Critical patent/JPS561724Y2/ja
Publication of JPS5266757U publication Critical patent/JPS5266757U/ja
Application granted granted Critical
Publication of JPS561724Y2 publication Critical patent/JPS561724Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1975153573U 1975-11-12 1975-11-12 Expired JPS561724Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975153573U JPS561724Y2 (https=) 1975-11-12 1975-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975153573U JPS561724Y2 (https=) 1975-11-12 1975-11-12

Publications (2)

Publication Number Publication Date
JPS5266757U JPS5266757U (https=) 1977-05-17
JPS561724Y2 true JPS561724Y2 (https=) 1981-01-16

Family

ID=28632832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975153573U Expired JPS561724Y2 (https=) 1975-11-12 1975-11-12

Country Status (1)

Country Link
JP (1) JPS561724Y2 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432438B2 (https=) * 1973-06-05 1979-10-15

Also Published As

Publication number Publication date
JPS5266757U (https=) 1977-05-17

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