JPS561724Y2 - - Google Patents

Info

Publication number
JPS561724Y2
JPS561724Y2 JP1975153573U JP15357375U JPS561724Y2 JP S561724 Y2 JPS561724 Y2 JP S561724Y2 JP 1975153573 U JP1975153573 U JP 1975153573U JP 15357375 U JP15357375 U JP 15357375U JP S561724 Y2 JPS561724 Y2 JP S561724Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975153573U
Other languages
Japanese (ja)
Other versions
JPS5266757U (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975153573U priority Critical patent/JPS561724Y2/ja
Publication of JPS5266757U publication Critical patent/JPS5266757U/ja
Application granted granted Critical
Publication of JPS561724Y2 publication Critical patent/JPS561724Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1975153573U 1975-11-12 1975-11-12 Expired JPS561724Y2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975153573U JPS561724Y2 (da) 1975-11-12 1975-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975153573U JPS561724Y2 (da) 1975-11-12 1975-11-12

Publications (2)

Publication Number Publication Date
JPS5266757U JPS5266757U (da) 1977-05-17
JPS561724Y2 true JPS561724Y2 (da) 1981-01-16

Family

ID=28632832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975153573U Expired JPS561724Y2 (da) 1975-11-12 1975-11-12

Country Status (1)

Country Link
JP (1) JPS561724Y2 (da)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010787A (da) * 1973-06-05 1975-02-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010787A (da) * 1973-06-05 1975-02-04

Also Published As

Publication number Publication date
JPS5266757U (da) 1977-05-17

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