JPS5617028Y2 - - Google Patents
Info
- Publication number
- JPS5617028Y2 JPS5617028Y2 JP1978176326U JP17632678U JPS5617028Y2 JP S5617028 Y2 JPS5617028 Y2 JP S5617028Y2 JP 1978176326 U JP1978176326 U JP 1978176326U JP 17632678 U JP17632678 U JP 17632678U JP S5617028 Y2 JPS5617028 Y2 JP S5617028Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1978176326U JPS5617028Y2 (it) | 1978-12-20 | 1978-12-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1978176326U JPS5617028Y2 (it) | 1978-12-20 | 1978-12-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5591696U JPS5591696U (it) | 1980-06-25 |
JPS5617028Y2 true JPS5617028Y2 (it) | 1981-04-21 |
Family
ID=29184749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1978176326U Expired JPS5617028Y2 (it) | 1978-12-20 | 1978-12-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5617028Y2 (it) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9337065B2 (en) | 2006-01-18 | 2016-05-10 | Akrion Systems, Llc | Systems and methods for drying a rotating substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5236755U (it) * | 1975-09-05 | 1977-03-15 |
-
1978
- 1978-12-20 JP JP1978176326U patent/JPS5617028Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5236755U (it) * | 1975-09-05 | 1977-03-15 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9337065B2 (en) | 2006-01-18 | 2016-05-10 | Akrion Systems, Llc | Systems and methods for drying a rotating substrate |
Also Published As
Publication number | Publication date |
---|---|
JPS5591696U (it) | 1980-06-25 |