JPS5617028Y2 - - Google Patents

Info

Publication number
JPS5617028Y2
JPS5617028Y2 JP1978176326U JP17632678U JPS5617028Y2 JP S5617028 Y2 JPS5617028 Y2 JP S5617028Y2 JP 1978176326 U JP1978176326 U JP 1978176326U JP 17632678 U JP17632678 U JP 17632678U JP S5617028 Y2 JPS5617028 Y2 JP S5617028Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978176326U
Other languages
Japanese (ja)
Other versions
JPS5591696U (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978176326U priority Critical patent/JPS5617028Y2/ja
Publication of JPS5591696U publication Critical patent/JPS5591696U/ja
Application granted granted Critical
Publication of JPS5617028Y2 publication Critical patent/JPS5617028Y2/ja
Expired legal-status Critical Current

Links

JP1978176326U 1978-12-20 1978-12-20 Expired JPS5617028Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978176326U JPS5617028Y2 (it) 1978-12-20 1978-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978176326U JPS5617028Y2 (it) 1978-12-20 1978-12-20

Publications (2)

Publication Number Publication Date
JPS5591696U JPS5591696U (it) 1980-06-25
JPS5617028Y2 true JPS5617028Y2 (it) 1981-04-21

Family

ID=29184749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978176326U Expired JPS5617028Y2 (it) 1978-12-20 1978-12-20

Country Status (1)

Country Link
JP (1) JPS5617028Y2 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337065B2 (en) 2006-01-18 2016-05-10 Akrion Systems, Llc Systems and methods for drying a rotating substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236755U (it) * 1975-09-05 1977-03-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236755U (it) * 1975-09-05 1977-03-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337065B2 (en) 2006-01-18 2016-05-10 Akrion Systems, Llc Systems and methods for drying a rotating substrate

Also Published As

Publication number Publication date
JPS5591696U (it) 1980-06-25

Similar Documents

Publication Publication Date Title
DE2939527C2 (it)
DE2939300C3 (it)
FR2414869B1 (it)
FR2414780B1 (it)
DE2831123C2 (it)
AU3898778A (it)
JPS5591696U (it)
FR2414932B3 (it)
AU3892778A (it)
AU73950S (it)
BG25836A1 (it)
BG25974A1 (it)
BG26594A1 (it)
BG26022A1 (it)
BG26017A1 (it)
BG26015A1 (it)
BG26014A1 (it)
BG26013A1 (it)
BG26012A1 (it)
BG26009A1 (it)
BG25849A1 (it)
BG25842A1 (it)
BG26008A1 (it)
BG26007A1 (it)
BG25854A1 (it)