JPS5617028Y2 - - Google Patents

Info

Publication number
JPS5617028Y2
JPS5617028Y2 JP1978176326U JP17632678U JPS5617028Y2 JP S5617028 Y2 JPS5617028 Y2 JP S5617028Y2 JP 1978176326 U JP1978176326 U JP 1978176326U JP 17632678 U JP17632678 U JP 17632678U JP S5617028 Y2 JPS5617028 Y2 JP S5617028Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978176326U
Other languages
Japanese (ja)
Other versions
JPS5591696U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978176326U priority Critical patent/JPS5617028Y2/ja
Publication of JPS5591696U publication Critical patent/JPS5591696U/ja
Application granted granted Critical
Publication of JPS5617028Y2 publication Critical patent/JPS5617028Y2/ja
Expired legal-status Critical Current

Links

JP1978176326U 1978-12-20 1978-12-20 Expired JPS5617028Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978176326U JPS5617028Y2 (enrdf_load_stackoverflow) 1978-12-20 1978-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978176326U JPS5617028Y2 (enrdf_load_stackoverflow) 1978-12-20 1978-12-20

Publications (2)

Publication Number Publication Date
JPS5591696U JPS5591696U (enrdf_load_stackoverflow) 1980-06-25
JPS5617028Y2 true JPS5617028Y2 (enrdf_load_stackoverflow) 1981-04-21

Family

ID=29184749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978176326U Expired JPS5617028Y2 (enrdf_load_stackoverflow) 1978-12-20 1978-12-20

Country Status (1)

Country Link
JP (1) JPS5617028Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337065B2 (en) 2006-01-18 2016-05-10 Akrion Systems, Llc Systems and methods for drying a rotating substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236755U (enrdf_load_stackoverflow) * 1975-09-05 1977-03-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9337065B2 (en) 2006-01-18 2016-05-10 Akrion Systems, Llc Systems and methods for drying a rotating substrate

Also Published As

Publication number Publication date
JPS5591696U (enrdf_load_stackoverflow) 1980-06-25

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