JPS56168540A - Aging device for sno2 series semiconductor gas sensor - Google Patents

Aging device for sno2 series semiconductor gas sensor

Info

Publication number
JPS56168540A
JPS56168540A JP7392380A JP7392380A JPS56168540A JP S56168540 A JPS56168540 A JP S56168540A JP 7392380 A JP7392380 A JP 7392380A JP 7392380 A JP7392380 A JP 7392380A JP S56168540 A JPS56168540 A JP S56168540A
Authority
JP
Japan
Prior art keywords
gas
sno2
aging
gas sensor
semiconductor gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7392380A
Other languages
Japanese (ja)
Inventor
Takeshi Tanabe
Masahiro Takemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP7392380A priority Critical patent/JPS56168540A/en
Publication of JPS56168540A publication Critical patent/JPS56168540A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To equalize the characteristics in the case the aging is performed in the gaseous atmosphere whose generating rate is high in the gas generated in the equipment itself in which a gas sensors are mounted, by making the aging time based on the maximum cooking time of a cooking machine. CONSTITUTION:After the gas sensors GS are set on a top plate 25 of a doping tank 22, aging time is set by a timer based on the maximum cooking time predetermined for the cooking machine. Then, a motor 19 and a heater 17 are started, and dimethyl siloxane gas is generated from a silicon compound 16. Said gas is completely filled in the doping tank by an agitating fan 18. In the meanwhile, the inside of the doping tank 22 is heated to 150-250 deg.C by the heater 17.
JP7392380A 1980-05-30 1980-05-30 Aging device for sno2 series semiconductor gas sensor Pending JPS56168540A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7392380A JPS56168540A (en) 1980-05-30 1980-05-30 Aging device for sno2 series semiconductor gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7392380A JPS56168540A (en) 1980-05-30 1980-05-30 Aging device for sno2 series semiconductor gas sensor

Publications (1)

Publication Number Publication Date
JPS56168540A true JPS56168540A (en) 1981-12-24

Family

ID=13532148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7392380A Pending JPS56168540A (en) 1980-05-30 1980-05-30 Aging device for sno2 series semiconductor gas sensor

Country Status (1)

Country Link
JP (1) JPS56168540A (en)

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