JPS56168421U - - Google Patents
Info
- Publication number
- JPS56168421U JPS56168421U JP6785880U JP6785880U JPS56168421U JP S56168421 U JPS56168421 U JP S56168421U JP 6785880 U JP6785880 U JP 6785880U JP 6785880 U JP6785880 U JP 6785880U JP S56168421 U JPS56168421 U JP S56168421U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Soil Working Implements (AREA)
- Arrangement Of Transmissions (AREA)
- Arrangement And Driving Of Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980067858U JPS6328005Y2 (en:Method) | 1980-05-16 | 1980-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980067858U JPS6328005Y2 (en:Method) | 1980-05-16 | 1980-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56168421U true JPS56168421U (en:Method) | 1981-12-12 |
| JPS6328005Y2 JPS6328005Y2 (en:Method) | 1988-07-28 |
Family
ID=29661831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980067858U Expired JPS6328005Y2 (en:Method) | 1980-05-16 | 1980-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328005Y2 (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013735U (ja) * | 1983-07-07 | 1985-01-30 | 富士通株式会社 | レジスト塗布装置 |
-
1980
- 1980-05-16 JP JP1980067858U patent/JPS6328005Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013735U (ja) * | 1983-07-07 | 1985-01-30 | 富士通株式会社 | レジスト塗布装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6328005Y2 (en:Method) | 1988-07-28 |