JPS56168421U - - Google Patents

Info

Publication number
JPS56168421U
JPS56168421U JP6785880U JP6785880U JPS56168421U JP S56168421 U JPS56168421 U JP S56168421U JP 6785880 U JP6785880 U JP 6785880U JP 6785880 U JP6785880 U JP 6785880U JP S56168421 U JPS56168421 U JP S56168421U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6785880U
Other languages
Japanese (ja)
Other versions
JPS6328005Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980067858U priority Critical patent/JPS6328005Y2/ja
Publication of JPS56168421U publication Critical patent/JPS56168421U/ja
Application granted granted Critical
Publication of JPS6328005Y2 publication Critical patent/JPS6328005Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Soil Working Implements (AREA)
  • Arrangement Of Transmissions (AREA)
  • Arrangement And Driving Of Transmission Devices (AREA)
JP1980067858U 1980-05-16 1980-05-16 Expired JPS6328005Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980067858U JPS6328005Y2 (cs) 1980-05-16 1980-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980067858U JPS6328005Y2 (cs) 1980-05-16 1980-05-16

Publications (2)

Publication Number Publication Date
JPS56168421U true JPS56168421U (cs) 1981-12-12
JPS6328005Y2 JPS6328005Y2 (cs) 1988-07-28

Family

ID=29661831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980067858U Expired JPS6328005Y2 (cs) 1980-05-16 1980-05-16

Country Status (1)

Country Link
JP (1) JPS6328005Y2 (cs)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013735U (ja) * 1983-07-07 1985-01-30 富士通株式会社 レジスト塗布装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013735U (ja) * 1983-07-07 1985-01-30 富士通株式会社 レジスト塗布装置

Also Published As

Publication number Publication date
JPS6328005Y2 (cs) 1988-07-28

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