JPS56166953U - - Google Patents
Info
- Publication number
- JPS56166953U JPS56166953U JP1980066478U JP6647880U JPS56166953U JP S56166953 U JPS56166953 U JP S56166953U JP 1980066478 U JP1980066478 U JP 1980066478U JP 6647880 U JP6647880 U JP 6647880U JP S56166953 U JPS56166953 U JP S56166953U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980066478U JPS56166953U (da) | 1980-05-14 | 1980-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980066478U JPS56166953U (da) | 1980-05-14 | 1980-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56166953U true JPS56166953U (da) | 1981-12-10 |
Family
ID=29660558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980066478U Pending JPS56166953U (da) | 1980-05-14 | 1980-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56166953U (da) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497495A (da) * | 1972-05-25 | 1974-01-23 | ||
| JPS5559458A (en) * | 1978-10-30 | 1980-05-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Processing method for electron beam resist |
-
1980
- 1980-05-14 JP JP1980066478U patent/JPS56166953U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497495A (da) * | 1972-05-25 | 1974-01-23 | ||
| JPS5559458A (en) * | 1978-10-30 | 1980-05-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Processing method for electron beam resist |