JPS5616534B2 - - Google Patents

Info

Publication number
JPS5616534B2
JPS5616534B2 JP16479378A JP16479378A JPS5616534B2 JP S5616534 B2 JPS5616534 B2 JP S5616534B2 JP 16479378 A JP16479378 A JP 16479378A JP 16479378 A JP16479378 A JP 16479378A JP S5616534 B2 JPS5616534 B2 JP S5616534B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16479378A
Other languages
Japanese (ja)
Other versions
JPS5591817A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16479378A priority Critical patent/JPS5591817A/ja
Publication of JPS5591817A publication Critical patent/JPS5591817A/ja
Publication of JPS5616534B2 publication Critical patent/JPS5616534B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP16479378A 1978-12-28 1978-12-28 Vapor phase epitaxial growth method Granted JPS5591817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16479378A JPS5591817A (en) 1978-12-28 1978-12-28 Vapor phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16479378A JPS5591817A (en) 1978-12-28 1978-12-28 Vapor phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS5591817A JPS5591817A (en) 1980-07-11
JPS5616534B2 true JPS5616534B2 (zh) 1981-04-16

Family

ID=15800040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16479378A Granted JPS5591817A (en) 1978-12-28 1978-12-28 Vapor phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5591817A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102618923A (zh) * 2012-04-11 2012-08-01 浙江金瑞泓科技股份有限公司 一种准减压外延生长方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4946103A (zh) * 1972-09-14 1974-05-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4946103A (zh) * 1972-09-14 1974-05-02

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102618923A (zh) * 2012-04-11 2012-08-01 浙江金瑞泓科技股份有限公司 一种准减压外延生长方法
CN102618923B (zh) * 2012-04-11 2015-09-02 浙江金瑞泓科技股份有限公司 一种准减压外延生长方法

Also Published As

Publication number Publication date
JPS5591817A (en) 1980-07-11

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