JPS5616534B2 - - Google Patents
Info
- Publication number
- JPS5616534B2 JPS5616534B2 JP16479378A JP16479378A JPS5616534B2 JP S5616534 B2 JPS5616534 B2 JP S5616534B2 JP 16479378 A JP16479378 A JP 16479378A JP 16479378 A JP16479378 A JP 16479378A JP S5616534 B2 JPS5616534 B2 JP S5616534B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16479378A JPS5591817A (en) | 1978-12-28 | 1978-12-28 | Vapor phase epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16479378A JPS5591817A (en) | 1978-12-28 | 1978-12-28 | Vapor phase epitaxial growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5591817A JPS5591817A (en) | 1980-07-11 |
JPS5616534B2 true JPS5616534B2 (zh) | 1981-04-16 |
Family
ID=15800040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16479378A Granted JPS5591817A (en) | 1978-12-28 | 1978-12-28 | Vapor phase epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5591817A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102618923A (zh) * | 2012-04-11 | 2012-08-01 | 浙江金瑞泓科技股份有限公司 | 一种准减压外延生长方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4946103A (zh) * | 1972-09-14 | 1974-05-02 |
-
1978
- 1978-12-28 JP JP16479378A patent/JPS5591817A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4946103A (zh) * | 1972-09-14 | 1974-05-02 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102618923A (zh) * | 2012-04-11 | 2012-08-01 | 浙江金瑞泓科技股份有限公司 | 一种准减压外延生长方法 |
CN102618923B (zh) * | 2012-04-11 | 2015-09-02 | 浙江金瑞泓科技股份有限公司 | 一种准减压外延生长方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5591817A (en) | 1980-07-11 |